1.Cluster tools(coming soon)
- 1 Coater , 1 Developer
- 6HPOs , 2VPOs , 2CPs , 4Indexers
- GUI
- 2”~6” wafer platform and 6”~8” platform


2.Dual Photoresist Reservoir
- Chemical deliver set
- Apply for four photo-resist pump at once
- PLC Controller , LED display , SMC digital vacuum switch
- Teflon reservoir


3.PCT 150/ PCT200
- Coater , Developer
- Designed on 50mm~200mm platform wafer size
- Transfer by robot or belt according to customer’s requirement
- Application: Silicon, GaAs, Glass wafer coating
- Generic nerve-networking using Ethernet


4.Refurbished SVG86/88 Track
- Wafer size : 50mm , 100mm , 150mm
- Application: Sapphire, GaAs, Silicon, Glass wafer coating
- Complete final test , providing on-site service
- Installation , Relocation , Decommission


5.Lithography In-line Interface Solution
- Interconnect between tracks and Aligner, Stepper
- Robotic arm with stepper motor
- PLC controller


6.Chemical Cabinet
- Fully auto refill
- Touch screen (128 colors graphic monitor)
- PLC controller


7.Photoresist Reservoir
- Chemical deliver set
- PLC controller , LED display , SMC digital vacuum switch
- Teflon reservoir


8.Utilities Alarm box
- Apply for all 8X series SVG tracks
- 16 signal input and 6 interlock signal
- LED and LCD display


9.Exhaust Controller
- Apply for all coater and developer modules
- Graphic LCD display
- MCU controller
- Available size 2.1/2” exhaust size
- Power extract from system:24V , ±18V